Rectangular Door Valves

The VR01P door valve is designed for use on vacuum chambers, enabling the transfer of substrates from atmosphere into vacuum environments.

TCT offers standard sizes tailored for the semiconductor industry, along with custom large-size options based on an L-motion design. This L-motion mechanism reduces friction and extends the service life of the O-ring.
Equipped with a secure locking mechanism, the valve ensures the door remains tightly sealed during operation.
Optional gate seal materials are available in both FKM and FFKM, allowing flexibility for various process requirements.