Retangular Transfer Valves
Retangular Transfer Valves

Retangular Transfer Valves

VD01P Series – Rectangular Transfer Valves

The VD01P series transfer valves are installed between two chambers to enable substrate transfer under vacuum conditions. TCT’s rectangular design allows for easy inline maintenance, eliminating the need to uninstall the valve from the system during part replacement.

  • Utilizing an L-motion mechanism, the valve minimizes friction and particle generation.
  • A position lock ensures secure operation, meeting the stringent requirements of the semiconductor industry
  • The actuator feedthrough is sealed with welded bellows, delivering ultra-low particle emission and outgassing rates—ideal for high-purity vacuum applications.
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