Gate Valves
TCT Gate Valves – High Vacuum & Ultra High Vacuum Isolation Solutions
TCT designs and manufactures reliable gate valves for both high vacuum and ultra high vacuum (UHV) environments. These valves are categorized by actuation mechanism and body material to suit various process requirements.
General Features
- Construction: Stainless steel or aluminum body options
- Sealing: Gate seals available in FKM or FFKM; bonnet seals include metal gaskets (OFHC copper) for UHV series
- Mechanism Options: Available in linkage or linear motion designs
- Applications: Semiconductor processing, ion implantation, plasma etching, and other high-vacuum technologies
1. High Vacuum Linkage Series – VG01P / VG01M
- Classic linkage drive design with compact structure
- Welded bellows feedthrough for high vacuum integrity
- Manual or pneumatic actuation
- Locking mechanism ensures stable operation under vibration
- Ideal for general high vacuum isolation
2. Ultra High Vacuum Linkage Series – VG02P / VG02M
- Enhanced for UHV systems with OFHC copper bonnet gasket
- Polished internal surfaces minimize particle generation
- Equipped with self-lubricating bearings and bushings for reduced friction
- Suitable for cleanroom or ultra-clean vacuum environments
3. High Vacuum Linear Motion Series – VG03P / VG03M
- Linear mechanism offers smoother motion and reduced wear
- Bellows-sealed feedthrough minimizes external leakage
- Available with FKM or optional FFKM sealing for aggressive gases
- Ideal for applications needing high durability with fewer particulates
4. Lightweight High Vacuum Series (Aluminum Body) – VGA1P
- Constructed with aluminum alloy for weight-sensitive systems
- Designed for etching, implantation, and compact vacuum modules
- Maintains high vacuum performance with reduced mass and footprint
VG01P Series- Linkage, High Vacuum, Pneumatic Gate Valve
The VG01P gate valve utilizes a classic linkage drive and is pneumatically actuated, offering compact form and high vacuum reliability. The welded bellows feedthrough ensures leak-tight integrity, while the built-in locking mechanism maintains stable operation even under vibration.
Ideal for general-purpose high vacuum isolation, this valve supports semiconductor and industrial vacuum systems where dependable sealing and vibration resistance are essential.
VG01M Series- Linkage, High Vacuum, Manual Gate Valve
The VG01M is the manual version of the VG01 series, featuring the same robust linkage drive and compact structure. With welded bellows for vacuum integrity and a mechanical lock for vibration stability, it is suited for systems that prioritize reliability without requiring pneumatic automation.
Recommended for cost-effective high vacuum isolation in cleanroom and processing environments.
VG02P Series- Linear, High Vacuum, Pneumatic Gate Valve
The VG02P valve is engineered for ultra-high vacuum systems, incorporating a metal OFHC copper bonnet gasket for extreme sealing performance. It features pneumatic actuation, self-lubricating bearings, and polished internal surfaces to reduce particle generation.
This model is optimized for cleanroom or ultra-clean vacuum applications requiring minimal outgassing and high resistance to process gases and particulates.
VG02M Series- Linear, High Vacuum, Manual Gate Valve
The VG02M shares the same UHV-grade construction as VG02P but is manually actuated, offering a simplified control option without compromising on cleanliness or durability.
Its OFHC copper bonnet gasket, self-lubricating components, and ultra-smooth internals make it ideal for precision vacuum isolation in sensitive environments.
VGA1P Series- Linear Aluminum, High Vacuum, Pneumatic Gate Valve
The VGA1P is a lightweight, aluminum-body gate valve designed for weight-sensitive or compact vacuum modules. With pneumatic actuation and a linear motion mechanism, it delivers smooth sealing and minimal footprint.
Perfect for applications in etching, ion implantation, and semiconductor tools, this valve maintains strong vacuum performance while reducing overall system mass and integration space.