What is a vacuum gate valve? Advantages of vacuum gate valve
Contents
As Taiwan's semiconductor and various electronic industries' production capacity expands year by year, process quality and production efficiency have become the primary considerations for manufacturers. The vacuum valve is the core equipment in the vacuum process system, and the vacuum quality also determines the yield. This article will introduce the advantages and disadvantages of vacuum gate valves, as well as learn more about the applications of UHV ultra-high vacuum gate valves.
What is a vacuum gate valve?
Vacuum Gate ValveThe working principle is to block or connect the medium in the pipeline by controlling the "gate" of the connecting pipeline. The vacuum valve is used to protect the vacuum pump and to guide the flow of the vacuum pump. In various vacuum automation production lines, it is used to control the flow of gas and achieve precise process control of connecting or cutting off the flow of pipelines. The common vacuum gate valves in the industry can be divided into two types: high-vacuum gate valve and ultra-high-vacuum gate valve.
Vacuum degree difference:
- High vacuum gate valve（HV Gate Valve）: 10-4 mbar ~ 10-8 mbar
- Ultra-high vacuum gate valve（UHV Gate Valve）: 10-9 mbar ~ 10-12 mbar
Basic structure
The vacuum valve is mainly composed of three parts, namely the top "actuator", "valve body" and "sealing gate".
- Actuator: The opening and closing of the valve can be divided into manual or pneumatic. Most of the vacuum gate valves of pneumatic switches are controlled by compressed air, and some are also operated with solenoid valves.
- Valve body: Vacuum gate valves are mostly made of stainless steel, aluminum alloy or other high-quality metal materials. Because metals have excellent corrosion resistance and heat resistance, and have high sealing properties, they can cope with most harsh operating environments and their service life is guaranteed.
- Gate: When the gate is closed, it can effectively cut off and seal off the air or process gas.
What are the applications of vacuum gate valves?
- Installed between the vacuum chamber and the vacuum pump, it can isolate the vacuum chamber and protect the vacuum pump.
- Used to transport products between different process vacuum chambers.
- Between the vacuum chamber and the vacuum pump, the vacuum gate valve can provide the function of regulating the control pressure.
What are the advantages of vacuum gate valves?
- Precision casting, good sealing
- Lightweight and easy to install
- The fluid resistance is small and the flow direction is not restricted
- Wide range of applications, suitable for a variety of medium gases
Ultra-high vacuum gate valve recommendation
This article recommends the VG02 series of ultra-high vacuum gate valves from Anlai Technology, which are suitable for various process conditions and can be installed in thousands of demanding applications, providing your vacuum system with greater reliability.
Product Features:
- With various location display options
- Use reed switch induction for switch signal transmission, or use mechanical micro switch for signal transmission
- The valve body is available in stainless steel and aluminum alloy. Aluminum alloy can be hardened by anodizing.
- The gates are designed with special ball and socket design on both sides to prevent sediment accumulation and ensure tightness.
- A visual position mechanism can be added to intuitively confirm whether the valve position is correct
Conclusion
Anlai is a vacuum valve developer and manufacturer that has helped various industries build high-quality vacuum systems. Our state-of-the-art equipment ensures high-precision orbital welding, leak checking and packaging. All of our manufacturing processes are SEMI compliant and we also provide all of our gas line weldments for semiconductor OEM tool manufacturers. With unparalleled expertise in the vacuum field, we provide comprehensive one-stop solutions to meet the unique needs of each customer. If you have any questions about vacuum gate valves or other vacuum parts, please contact us！